Key features
Smart Print UV is a maskless lithography equipment, based on a DMD projection technology, compatible with a wide range of resists and substrates. This machine can produce any 2D shapes at micron resolution without the need for a hard mask. It's perfectly designed for any application fields requiring surface micro patterning such as microfluidics, biotechnologies and microelectronics.
TIME & MONEY SAVING
Test and adjust your pattern quickly.
No need for a hard mask, lithograph directly your sample in a few seconds.
ADJUSTABLE WRITING FIELD AND RESOLUTION
Our projection to objective technology gives user access to four different writing resolution to combine writing precision and speed.
With our "quick release" system, the resolution can be changed in just a couple of seconds without any calibration step.
ALIGN YOUR DESIGN ON YOUR PATTERNS
The feedback camera coupled with the secondary 590 nm light source allows direct overlay of the design on top of the sample, making the alignment steps very intuitive for the user.
A WIDE RANGE OF SUBSTRATES, UP TO 5” SQUARE
Our objective range has been carefully selected with a long working distance (up to 3 cm) to make Smart Print UV a contactless technology and thus compatible with non-standard substrates (non-flat, flexible, thick).
DOWN TO 1.5 MICRON-WIDE FEATURES
Adapt the writing resolution to your design. Use a wide field of view to pattern quickly with 1x objective, and achieve down to 1.5 µm minimal feature size using the 10x objective.
TABLETOP WITH SMALL FOOTPRINT
Benefit from Smart Print UV high compacity. Dimensions: W: 52cm, D: 52cm, H: 69cm.
It can adapt to clean room environments and is self-standing with no external equipment required.
Specifications
Materials
Smart Print UV is equipped with a 385 nm LED source to be compatible with i, h and g-line photoresists, as well as broadband photoresists, both positive and negative, such as SU8 or AZ® 1500 series.
Software
Our brand new software Phaos offers a unique user experience with its intuitive interface that allows users to go from a design to the fabrication of micro-patterns in just a few clicks. Phaos offers many options (automatic dose test, alignment, …) addressing both novice and advanced users.
Technology
Our brand-new Smart Print UV (SP-UV) maskless lithography system uses a Digital Micromirror Device (DMD) technology It gives user a straightforward way to move from the design directly to the patterned sample without the use of the standard photomask fabrication.
No needs of photomask means more flexibility, and faster overall fabrication time.
Realizations
Lithography of electrodes on a graphene layer on a flexible film of parylene©. Courtesy of Institut Néel - Realized with Smart Print UV
Custom design mini heater mat for cell culture. Functional device in copper.
Dithered image lithography of « La dent de Crolles », a mountain near Grenoble. Complete lithography achieved in 3 seconds.
Christmas-tree-shaped microfluidic system by means of a lithographed silicon master replicated with PDMS.
FET devices based on Graphene and MoS2 flakes – Courtesy of J. Island, USA, Nanomanufacturing 2021, 1, 49–56 - Realized with Smart Print UV
Cell sorting device fabricated in a 90-µm SU8 layer - Realized with Smart Print UV