Principle

Our brand-new Smart Print UV (SP-UV) maskless lithography system uses a Digital Micromirror Device (DMD) technology It gives user a straightforward way to move from the design directly to the patterned sample without the use of the standard photomask fabrication.

No needs of photomask means more flexibility, and faster overall fabrication time.

Alignment

SP-UV is equipped with a 385 nm LED source to be compatible with standard g-, h- and i-line photoresists (such as SU-8).

SP-UV also integrates a secondary yellow LED source coupled with a feedback camera for focusing, inspection and alignment procedure.

Resolution

Our quick-release objective technology gives user access to four different writing resolution to combine writing precision and speed.

Our objective range has been carefully selected with a large working distance (up to 3 cm) to make SP-UV compatible with non-standard substrates (non-flat, flexible, thick).

Scientific publications

The Microlight3D maskless lithography technology was used for the following publications :

Melt electrowriting to produce microfiber fragments
Polymers for Advanced Technologies, H. Haag et al, 2022 – DOI: 10.1002/pat.5641

 

Low-Temperature Bonding of Nanolayered InGaP/SiO2 Waveguides for Spontaneous-Parametric Down Conversion
ACS Applied Nano Materials, A. P. Amores and M. Swillo, 2022, doi.org/10.1021/acsanm.1c04202

 

High open-circuit voltage in transition metal dichalcogenide solar cells,
Nano Energy, S.A. Svatek et al, 2021, DOI: 10.1016/j.nanoen.2020.105427

 

Block-Copolymers Enable Direct Reduction and Structuration of Noble Metal-based Films
Maxime Gayrard, Francois Chancerel, Maria de Marco, Denys Naumenko, Cédric Boissière, et al..
Small, Wiley-VCH Verlag, 2021.

 

Dynamical Backaction in an Ultrahigh-Finesse Fiber-Based Microcavity
Felix Rochau, Irene Sánchez Arribas, Alexandre Brieussel, Sebastian Stapfner, David Hunger, and Eva M. Weig
Phys. Rev. Applied 16, 014013 – Published 7 July 2021

 

The Peculiarities of the Acoustic Waves of Zero-Order Focusing in Lithium Niobate Plate,
Sensors, I. Kuznetsova et al, 2021, DOI: 10.3390/s21124000

 

Enabling high efficiencies in MoS2 homojunction solar cells,
2021 IEEE 48th Photovoltaic Specialists Conference (PVSC), C. Bueno-Blanco et al, 2021

DOI: 10.1109/PVSC43889.2021.9518851

 

Microheater Actuators as a Versatile Platform for Strain Engineering in 2D Materials

Yu Kyoung Ryu, Felix Carrascoso, Rubén López-Nebreda, Nicolás Agraït, Riccardo Frisenda, and Andres Castellanos-Gomez

Nano Lett. 2020, 20, 7, 5339–5345 https://doi.org/10.1021/acs.nanolett.0c01706

 

Fabrication of a Multiple Heater-Sensor Platform for Cell Temperature Monitoring

A. Garraud, S. Basrour and D. Peyrade

2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), Lyon, France, 2020, pp. 1-4, doi: 10.1109/DTIP51112.2020.9139132.

 

High open-circuit voltage Mos2 homojunction – effect of Schottky barriers at the contacts,
2020 47th IEEE Photovoltaic Specialists Conference (PVSC), C. Bueno-Blanco et al, 2020

DOI: 10.1109/PVSC45281.2020.9301009

 

Multifunctional sensor (Magnetic field and temperature) based on Micro-structured and multilayered SAW device

H. Mishra et al.
2020 IEEE International Ultrasonics Symposium (IUS), DOI: 10.1109/IUS46767.2020.9251657

 

A system for the deterministic transfer of 2D materials under inert environmental conditions

P. Gant et al

2020, 2D Materials, DOI: 10.1088/2053-1583/ab72d6

 

Fractal rectenna for collecting energy in the Wi-Fi range

A.V. Smirnov et al

2020, RENSIT, DOI: 10.17725/rensit.2020.12.313

 

Wireless stretchable SAW sensors based on Z-cut lithium niobate, 2019 IEEE SENSORS, C. Floer et al, 2020

DOI: 10.1109/SENSORS43011.2019.8956784

 

Patterned Quantum Dot Photosensitive FETs for Medium Frequency Optoelectronics

A.G. Shulga et al

2019, Advanced Materials Technologies, DOI: 10.1002/admt.201900054