Microlight3D at the SPIE. Conference

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Principle

Our brand-new Smart Print UV (SP-UV) maskless lithography system uses a Digital Micromirror Device (DMD) technology It gives user a straightforward way to move from the design directly to the patterned sample without the use of the standard photomask fabrication.

No needs of photomask means more flexibility, and faster overall fabrication time.

Alignment

SP-UV is equipped with a 385 nm LED source to be compatible with standard g-, h- and i-line photoresists (such as SU-8).

SP-UV also integrates a secondary yellow LED source coupled with a feedback camera for focusing, inspection and alignment procedure.

Resolution

Our quick-release objective technology gives user access to four different writing resolution to combine writing precision and speed.

Our objective range has been carefully selected with a large working distance (up to 3 cm) to make SP-UV compatible with non-standard substrates (non-flat, flexible, thick).

Scientific publications

The Microlight3D maskless lithography technology was used for the following publications :

A ferromagnetic spin source grown by atomic layer deposition
Applied Physics Letters, B. Quinard et al, 2022
DOI: 10.1063/5.0087869

 

Counting DNA Molecules on a Microchannel Surface for Quantitative Analysis
SSRN, T. Kim et al, 2022
DOI: 10.2139/ssrn.4103373

 

ZnO Piezoelectric Films for Acoustoelectronic and Microenergetic Applications.

Golovanov, E.; Kolesov, V.; Anisimkin, V.; Osipenko, V.; Kuznetsova, I. 
Coatings 2022, 12, 709. https://doi.org/10.3390/coatings12050709

 

Melt electrowriting to produce microfiber fragments
Polymers for Advanced Technologies, H. Haag et al, 2022 – DOI: 10.1002/pat.5641

 

Low-Temperature Bonding of Nanolayered InGaP/SiO2 Waveguides for Spontaneous-Parametric Down Conversion
ACS Applied Nano Materials, A. P. Amores and M. Swillo, 2022, doi.org/10.1021/acsanm.1c04202

 

High open-circuit voltage in transition metal dichalcogenide solar cells,
Nano Energy, S.A. Svatek et al, 2021, DOI: 10.1016/j.nanoen.2020.105427

 

Block-Copolymers Enable Direct Reduction and Structuration of Noble Metal-based Films
Maxime Gayrard, Francois Chancerel, Maria de Marco, Denys Naumenko, Cédric Boissière, et al..
Small, Wiley-VCH Verlag, 2021.

 

Dynamical Backaction in an Ultrahigh-Finesse Fiber-Based Microcavity
Felix Rochau, Irene Sánchez Arribas, Alexandre Brieussel, Sebastian Stapfner, David Hunger, and Eva M. Weig
Phys. Rev. Applied 16, 014013 – Published 7 July 2021

 

The Peculiarities of the Acoustic Waves of Zero-Order Focusing in Lithium Niobate Plate,
Sensors, I. Kuznetsova et al, 2021, DOI: 10.3390/s21124000

 

Enabling high efficiencies in MoS2 homojunction solar cells,
2021 IEEE 48th Photovoltaic Specialists Conference (PVSC), C. Bueno-Blanco et al, 2021

DOI: 10.1109/PVSC43889.2021.9518851

 

A Weak Form Nonlinear Model for Thermal Sensitivity of Love Wave Mode on Layered Structures,

IEEE Transactions on Ultrasonic, Ferroelectrics, and Frequency Controle (TUFFC), Y. Yang et al, 2020

DOI: 10.1109/TUFFC.2020.2968007

 

DNA functionalized spider silk nanohydrogels for specific cell attachment and patterning
ACS Nano, C. Heinritz et al, 2022
DOI: 10.1021/acsnano.1c11148

 

Aptamer-Modified Nanohydrogel Microarrays for Bioselective Cancer Cell Immobilization
Advanced Functional Materials, Z. Lamberger et al, 2022
DOI: 10.1002/adfm.202207270

 

Dual Patterning of Self-Assembling Spider Silk Protein Nanofibrillar Networks
Advanced Materials Interfaces, Z. Lamberger et al, 2022
DOI: 10.1002/admi.202201173

 

Selective Topography Directed Cell Adhesion on Spider Silk Surfaces
Advanced Materials Interfaces, S. Lentz et al, 2022
DOI: 10.1002/admi.202201936

 

MoS2 solar cell with 120 nm-absorber and 3.8% AM1.5G efficiency
2022 IEEE 49th Photovoltaics Specialists Conference (PVSC), E. Antolin et al, 2022
DOI: 10.1109/PVSC48317.2022.9938583

Microheater Actuators as a Versatile Platform for Strain Engineering in 2D Materials

Yu Kyoung Ryu, Felix Carrascoso, Rubén López-Nebreda, Nicolás Agraït, Riccardo Frisenda, and Andres Castellanos-Gomez

Nano Lett. 2020, 20, 7, 5339–5345 https://doi.org/10.1021/acs.nanolett.0c01706

 

Fabrication of a Multiple Heater-Sensor Platform for Cell Temperature Monitoring

A. Garraud, S. Basrour and D. Peyrade

2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), Lyon, France, 2020, pp. 1-4, doi: 10.1109/DTIP51112.2020.9139132.

 

High open-circuit voltage Mos2 homojunction – effect of Schottky barriers at the contacts,
2020 47th IEEE Photovoltaic Specialists Conference (PVSC), C. Bueno-Blanco et al, 2020

DOI: 10.1109/PVSC45281.2020.9301009

 

Multifunctional sensor (Magnetic field and temperature) based on Micro-structured and multilayered SAW device

H. Mishra et al.
2020 IEEE International Ultrasonics Symposium (IUS), DOI: 10.1109/IUS46767.2020.9251657

 

A system for the deterministic transfer of 2D materials under inert environmental conditions

P. Gant et al

2020, 2D Materials, DOI: 10.1088/2053-1583/ab72d6

 

Fractal rectenna for collecting energy in the Wi-Fi range

A.V. Smirnov et al

2020, RENSIT, DOI: 10.17725/rensit.2020.12.313

 

Wireless stretchable SAW sensors based on Z-cut lithium niobate, 2019 IEEE SENSORS, C. Floer et al, 2020

DOI: 10.1109/SENSORS43011.2019.8956784

 

Patterned Quantum Dot Photosensitive FETs for Medium Frequency Optoelectronics

A.G. Shulga et al

2019, Advanced Materials Technologies, DOI: 10.1002/admt.201900054

 

Twelve Colors of Streptavidin–Fluorescent Proteins (SA-FPs): A Versatile Tool to Visualize Genetic Information in Single-Molecule DNA,
Analytical Chemistry, Y. Jin et al, 2022
DOI: 10.1021/acs.analchem.2c04344

 

Pure edge‑contact devices on single‑layer‑CVD‑graphene integrated into a single chip
Scientific Reports, S. Behera, 2023
DOI: 10.1038/s41598-023-37487-1

 

Heated Assembly and Transfer of Van der Waals Heterostructures with Common Nail Polish
Nanomanufacturing, K.L. Haley et al, 2021
DOI: 10.3390/nanomanufacturing1010005

 

Topological defects at smectic interfaces as a potential tool for the biosensing of living microorganisms
arXiv, V.S. Badha et al, 2023
DOI: 10.48550/arXiv.2306.12989

 

Langmuir-Blodgett Films of Arachidic and Stearic Acids as Sensitive Coatings for Chloroform HF SAW Sensors
Sensors, I. Gorbachev et al, 2022
DOI: 10.3390/s23010100

 

Backward AcousticWaves in Piezoelectric Plates: Possible Application as Base for Liquid Sensors
Sensors, A. Smirnov et al, 2023
DOI: 10.3390/s23020648